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Resists for fine-line lithography : Michael Hatzakis. Proc. IEEE71 (5), 570 (1983)

Book ID: 103279689
Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 124 KB
Volume: 24
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(84)90753-4

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