✦ LIBER ✦
X-ray lithography for VLSI : Baylor B. Triplett and Richard F. Hollman. Proc. IEEE71 (5), 585 (1983)
- Book ID
- 103279700
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 253 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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