Resistivity recovery of thin sputtered aluminium films : C. R. Tellier and A. J. Tosser. Electrocomponent Sci. and Technol.3, 85 (1976)

• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 125 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(77)90136-6