Resistivity changes of heavily-boron-doped CVD-prepared polycrystalline silicon caused by thermal annealing

✍ Scribed by T. Makino; H. Nakamura

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 585 KB
• Volume: 24
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(81)90211-2