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Resistivity and structure of sputtered molybdenum films : F. M. d'Heurle, Trans. Metall. Soc. AIME, 236, No. 3, March (1966), p. 321

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 96 KB
Volume: 6
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(67)90237-5

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