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Resistivity and hall effect of reactively zirconium nitride films

✍ Scribed by M. Saib; J.C. Francois; P. Gravier; M. Sigrist; L. Argeme; O. Cerclier

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 311 KB
Volume: 58
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(86)90810-0

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The existence of with hardness characteristics similar or better than diamond was predicted in 1990 by Liu b-C 3 N 4 and Cohen. Many studies have since been devoted to the synthesis of this compound. In the present work, carbon nitride Ðlms were deposited by various reactive magnetron sputtering pro