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Resistance of turbo-molecular pump to gallium

✍ Scribed by C. Urano; H. Kotaka; H. Enosawa; K. Obokata

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 326 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)94165-m

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