Three-dimensional low-density flows in the spiral grooves of a turbo-molecular pump

✍ Scribed by K. Nanbu; S. Igarashi

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 360 KB
• Volume: 21
• Category: Article
• ISSN: 0045-7930
• DOI: 10.1016/0045-7930(92)90021-m