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Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

✍ Scribed by Xu Song; Kong Boon Yeap; Jing Zhu; Jonathan Belnoue; Marco Sebastiani; Edoardo Bemporad; Kaiyang Zeng; Alexander M. Korsunsky

Book ID: 113937452
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 628 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.10.211

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