Nickel titanium and nickel titanium hafn
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J. Rao; T. Roberts; K. Lawson; J. Nicholls
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Article
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2010
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Elsevier Science
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English
โ 500 KB
Shape memory alloy (SMA) coatings of NiTi and NiTiHf have been deposited onto Si substrates using pulse DC sputtering. Coatings of NiTi with compositions containing 45 to 65 at.% Ti have been fabricated by cosputtering NiTi with Ti. NiTiHf coatings with Hf compositions ranging from 2 to 30 at.% Hf h