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Residual stress-loaded titanium$ndash$nickel shape-memory alloy thin-film micro-actuators

โœ Scribed by Wang, Rong Xin; Zohar, Yitshak; Wong, Man


Book ID
127001999
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
254 KB
Volume
12
Category
Article
ISSN
0960-1317

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Nickel titanium and nickel titanium hafn
โœ J. Rao; T. Roberts; K. Lawson; J. Nicholls ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 500 KB

Shape memory alloy (SMA) coatings of NiTi and NiTiHf have been deposited onto Si substrates using pulse DC sputtering. Coatings of NiTi with compositions containing 45 to 65 at.% Ti have been fabricated by cosputtering NiTi with Ti. NiTiHf coatings with Hf compositions ranging from 2 to 30 at.% Hf h