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[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Shape memory alloy thin film fabricated by laser ablation

✍ Scribed by Ikuta, K.; Hayashi, M.; Matsuura, T.; Fujishiro, H.

Book ID: 126801923
Publisher: IEEE
Year: 1994
Tongue: English
Weight: 446 KB
Category: Article
ISBN-13: 9780780318335
DOI: 10.1109/memsys.1994.556166

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