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[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Buckled membranes for microstructures

✍ Scribed by Popescu, D.S.; Lammerink, T.S.J.; Elwenspoek, M.

Book ID: 126599865
Publisher: IEEE
Year: 1994
Weight: 396 KB
Category: Article
ISBN-13: 9780780318335
DOI: 10.1109/MEMSYS.1994.555621

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