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Residual impurities in epitaxial layers grown by MOVPE

✍ Scribed by M. Hata; N. Fukuhara; Y. Zempo; M. Isemura; T. Yako; T. Maeda

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 497 KB
Volume: 93
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(88)90581-7

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