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Research on TiN Thin Films Prepared by Ion Beam Mixing

โœ Scribed by Yan, Pengxun

Book ID
105382587
Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
357 KB
Volume
124
Category
Article
ISSN
0031-8965

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๐Ÿ“œ SIMILAR VOLUMES

Indium tin oxide thin films prepared by
Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents
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## Abstract Indium tin oxide (ITO) films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique (IBAD) at different ion beam currents (80โ€“120 mA). The effect of the ion beam current on films properties has been studied. The films prepared at low ion

Fundamental study of TiN films deposited
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โœ K. Hayashi; K. Sugiyama; K. Fukutani; H. Kittaka ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 393 KB

A study was performed to investigate the influence of process parameters on the properties of TiN films deposited by ion beam mixing. Relatively dense and homogeneous structures or dense columnar structures were observed by scanning electron microscopy. From the results of X-ray diffraction and X-ra