## Abstract A flexible, nondestructive, and cost‐effective replication technique for nanostructures is presented. The advantages of the process are: 1) it allows for tailoring structural parameters of the replica (e.g., line width) nearly independent of the structural geometry of the master; 2) it
✦ LIBER ✦
Replication techniques for ceramic microcomponents with high aspect ratios
✍ Scribed by W. Bauer; R. Knitter; A. Emde; G. Bartelt; D. Göhring; E. Hansjosten
- Publisher
- Springer-Verlag
- Year
- 2002
- Tongue
- English
- Weight
- 238 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0946-7076
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