Replication of very small periodic gratings with proximity x-ray lithography

✍ Scribed by Y. Chen; R.K. Kupka; F. Rousseaux; M.F. Ravet; F. Carcenac; A. Madouri; H. Launois

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 389 KB
• Volume: 23
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(94)90146-5