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Replication of very small periodic gratings with proximity x-ray lithography

โœ Scribed by Y. Chen; R.K. Kupka; F. Rousseaux; M.F. Ravet; F. Carcenac; A. Madouri; H. Launois


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
389 KB
Volume
23
Category
Article
ISSN
0167-9317

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