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Replaceable corrosion-resistant tool joint seal


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
122 KB
Volume
2004
Category
Article
ISSN
1350-4789

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๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 127 KB

This invention relates to a seal assembly for use in equipment in the electronics manufacturing industry that has a replaceable barrier to shield an elastomeric seal from direct exposure to a plasma. Commercially available seal and barrier shield assemblies comprise a bonded rubber seal and a contin