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Plasma-resistant seal assembly with replaceable barrier shield

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
127 KB
Volume
2007
Category
Article
ISSN
1350-4789

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โœฆ Synopsis

This invention relates to a seal assembly for use in equipment in the electronics manufacturing industry that has a replaceable barrier to shield an elastomeric seal from direct exposure to a plasma. Commercially available seal and barrier shield assemblies comprise a bonded rubber seal and a continuous ring barrier that must be installed when the assembly is manufactured. Neither the bonded rubber seal, nor the barrier shield ring may be readily replaced in the

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