Removal of the photoresist (PR) and metallic-polymer in the concave-typed storage node using the excimer laser

✍ Scribed by Hyun-Jung Kim; Dae-Jin Kim; Je-Kil Ryu; Sung-Sik Pak

• Book ID: 103815854
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 399 KB
• Volume: 228
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2003.12.029