Removal of moisture contamination from porous polymeric low-k dielectric films

✍ Scribed by Asad Iqbal; Harpreet Juneja; Junpin Yao; Farhang Shadman

• Publisher: American Institute of Chemical Engineers
• Year: 2006
• Tongue: English
• Weight: 180 KB
• Volume: 52
• Category: Article
• ISSN: 0001-1541
• DOI: 10.1002/aic.10760