Large-area submicron replica molding of porous low-k dielectric films and application to photonic crystal biosensor fabrication

✍ Scribed by Ian D. Block; Leo L. Chan; Brian T. Cunningham

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 746 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.12.011