Removal of Diamond-Like Carbon Film by Oxygen-Dominated Plasma Beam Converted from Filtered Carbon-Cathodic Arc

✍ Scribed by Tanoue, Hideto; Kamiya, Masao; Suda, Yoshiyuki; Takikawa, Hirofumi; Oke, Shinichiro; Hasegawa, Yushi; Taki, Makoto; Tsuji, Nobuhiro; Ishikawa, Takeshi; Yasui, Haruyuki

• Book ID: 118009758
• Publisher: Institute of Pure and Applied Physics
• Year: 2011
• Tongue: English
• Weight: 1012 KB
• Volume: 50
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.50.01af12