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Removal of Boron in Silicon by H2-H2O Gas Mixtures

✍ Scribed by Kai Tang, Stefan Andersson, Erlend Nordstrand, Merete Tangstad

Book ID: 120951534
Publisher: The Minerals, Metals & Materials Society
Year: 2012
Tongue: English
Weight: 284 KB
Volume: 64
Category: Article
ISSN: 1047-4838
DOI: 10.1007/s11837-012-0368-3

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