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Reliable Ti/Al and Ti/Al/Ni/Au ohmic contacts to n-type GaN formed by vacuum annealing

✍ Scribed by N. A. Papanicolaou; M. V. Rao; J. Mittereder; W. T. Anderson

Book ID: 126683700
Publisher: AVS (American Vacuum Society)
Year: 2001
Tongue: English
Weight: 616 KB
Volume: 19
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.1331291

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