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Relaxation of excited species in He/N 2 pulsed RF discharges: kinetics of metastable species

✍ Scribed by Benedictis, S De; Dilecce, G


Book ID
120468014
Publisher
Institute of Physics
Year
1995
Tongue
English
Weight
879 KB
Volume
4
Category
Article
ISSN
0963-0252

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