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Relative roles of acetic acid, dodecyl sulfate and benzotriazole in chemical mechanical and electrochemical mechanical planarization of copper

✍ Scribed by P.C. Goonetilleke; D. Roy

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 525 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.10.005

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