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Relation between the uniformity of the radical density distribution and the electron density profile

✍ Scribed by Yong-Jin Kim; Sun-Kyu Song; Hong-Young Chang

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 311 KB
Volume: 177
Category: Article
ISSN: 0375-9601
DOI: 10.1016/0375-9601(93)90031-t

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