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Relation between the leakage currents and the defects created in the oxide and at the interface in a short channel NMOS transistor

✍ Scribed by A. Bouhdada; S. Bakkali; A. Nouaçry; A. Touhami


Book ID
104157749
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
478 KB
Volume
28
Category
Article
ISSN
0026-2692

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Effect of defects localised in the oxide
✍ A. Bouhdada; A. Nouacry; S. Bakkali; A. Touhami; R. Marrakh 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 194 KB

The increase of the MOS integration scale entails the presence of strong electrical fields in the MOS channel transistor, which cause the injection of hot carriers in the gate oxide and create defects at the Si/SiO 2 interface and in the oxide layer. These defects induce leakage currents and are res