Effect of defects localised in the oxide
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A. Bouhdada; A. Nouacry; S. Bakkali; A. Touhami; R. Marrakh
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Article
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1999
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Elsevier Science
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English
⚖ 194 KB
The increase of the MOS integration scale entails the presence of strong electrical fields in the MOS channel transistor, which cause the injection of hot carriers in the gate oxide and create defects at the Si/SiO 2 interface and in the oxide layer. These defects induce leakage currents and are res