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Regulating effect of SiO2 interlayer on optical properties of ZnO thin films

✍ Scribed by Xu, Linhua; Zheng, Gaige; Miao, Juhong; Su, Jing; Zhang, Chengyi; Shen, Hua; Zhao, Lilong


Book ID
121354661
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
720 KB
Volume
136
Category
Article
ISSN
0022-2313

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## Abstract SiC film was deposited by electron beam‐physical vapor deposition on thermal oxidized silicon substrates at 750Β°C, and SiC/SiO~2~ composite thin film was prepared. The obtained composite film was analyzed by Fourier‐transform infrared (FTIR) transmission and reflection spectroscopy, and