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Regular relief on a silicon surface as a structural defect getter

✍ Scribed by L. S. Berman; I. V. Grekhov; L. S. Kostina; E. I. Belyakova; E. D. Kim; S. C. Kim


Book ID
110123831
Publisher
SP MAIK Nauka/Interperiodica
Year
1999
Tongue
English
Weight
65 KB
Volume
25
Category
Article
ISSN
1063-7850

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