✦ LIBER ✦

Role of masking oxide on the silicon surface on defect formation in SIMOX structures

✍ Scribed by A. Yu. Askinazi; A. P. Baraban; L. V. Miloglyadova

Book ID: 110131275
Publisher: Springer
Year: 2002
Tongue: English
Weight: 59 KB
Volume: 47
Category: Article
ISSN: 1063-7842
DOI: 10.1134/1.1479985

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Phase formation in a nanosize silicon ox

Phase formation in a nanosize silicon oxide film on the surface of aluminum oxide

✍ V. V. Gusarov; A. A. Malkov; Zh. N. Ishutina; A. A. Malygin 📂 Article 📅 1998 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 54 KB

Studies on the surface swelling of ion-i

Studies on the surface swelling of ion-irradiated silicon: Role of defects

✍ P.K. Giri 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 248 KB

Specific features of formation of radiat

Specific features of formation of radiation defects in the silicon layer in “silicon-on-insulator” structures

✍ K. D. Shcherbachev; V. T. Bublik; V. N. Mordkovich; D. M. Pazhin 📂 Article 📅 2011 🏛 Springer 🌐 English ⚖ 359 KB

Formation of titanium oxide films on the

Formation of titanium oxide films on the surface of porous silicon carbide

✍ Yu. Yu. Bacherikov; N. L. Dmitruk; R. V. Konakova; O. S. Kondratenko; V. V. Mile 📂 Article 📅 2008 🏛 Springer 🌐 English ⚖ 224 KB

Effect of porous silicon formation on st

Effect of porous silicon formation on stiction in surface micromachined MEMS structures

✍ Bhattacharya, Enakshi ;Rani, Helen Anitha ;Venu Babu, U. ;Rao, P. R. S. ;Bhat, K 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 170 KB

## Abstract Stiction, or adhesion of components to one another, is a major failure mechanism in surface micromachined MEMS. In this paper we discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effec

Chemical assembly of chromium oxide stru

Chemical assembly of chromium oxide structures on the surface of disperse silicon carbide

✍ K. S. Anisimov; A. A. Malkov; S. D. Dubrovenskii; A. A. Malygin 📂 Article 📅 2011 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 309 KB