Registration mark detection for electron-beam lithography—EL1 system: Donald E. Davis. IBM J. Res. Develop. 24 (5), 545 (September 1980)

• Book ID: 103274948
• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 162 KB
• Volume: 21
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(81)90533-3