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Reflectivity test of X-ray mirrors for deep X-ray lithography

✍ Scribed by V. Nazmov; E. Reznikova; A. Last; M. Boerner; J. Mohr

Publisher: Springer-Verlag
Year: 2008
Tongue: English
Weight: 221 KB
Volume: 14
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-008-0581-8

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