Reflective phase shift measurement of the Mo/Si multilayer mirror in extreme ultraviolet region

✍ Scribed by Wang, Fengli; Liu, Lei; Duan, Wei; Jiang, Li; Li, Wenbin; Wang, Zhanshan; Zhu, Jingtao; Zhang, Zhong; Chen, Lingyan; Zhou, Hongjun; Huo, Tonglin

• Book ID: 120636174
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 898 KB
• Volume: 124
• Category: Article
• ISSN: 0030-4026
• DOI: 10.1016/j.ijleo.2013.03.088