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Reflection spectrum for a thin film with non-uniform thickness

✍ Scribed by Pisarkiewicz, T


Book ID
120288047
Publisher
Institute of Physics
Year
1994
Tongue
English
Weight
274 KB
Volume
27
Category
Article
ISSN
0022-3727

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πŸ“œ SIMILAR VOLUMES


Multilayer thin films/substrate system w
✍ D. Ngo; X. Feng; Y. Huang; A.J. Rosakis πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 279 KB

Current methodologies used to infer thin-film stress from curvature measurements are strictly restricted to stress and curvature states that are assumed to remain uniform over the entire film/substrate system. These methodologies have recently been extended to a single thin film of non-uniform thick