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Electric field localizations in thin dielectric films with thickness non-uniformities

✍ Scribed by G. Puglisi; G. Zurlo


Book ID
113597965
Publisher
Elsevier Science
Year
2012
Tongue
French
Weight
457 KB
Volume
70
Category
Article
ISSN
0304-3886

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Multilayer thin films/substrate system w
✍ D. Ngo; X. Feng; Y. Huang; A.J. Rosakis πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 279 KB

Current methodologies used to infer thin-film stress from curvature measurements are strictly restricted to stress and curvature states that are assumed to remain uniform over the entire film/substrate system. These methodologies have recently been extended to a single thin film of non-uniform thick