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Reduction of the defect density in GaN films using ultra-thin AlN buffer layers on 6H-SiC

✍ Scribed by Satoru Tanaka; Sohachi Iwai; Yoshinobu Aoyagi

Book ID: 108342270
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 960 KB
Volume: 170
Category: Article
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(96)00611-2

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