Reduction of photoresist standing-wave effects by post-exposure bake

✍ Scribed by Walker, E.J.

• Book ID: 114591868
• Publisher: IEEE
• Year: 1975
• Tongue: English
• Weight: 411 KB
• Volume: 22
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1975.18162