✦ LIBER ✦
Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination
✍ Scribed by Y.-J. Chuang; F.-G. Tseng; W.-K. Lin
- Book ID
- 106184496
- Publisher
- Springer-Verlag
- Year
- 2002
- Tongue
- English
- Weight
- 195 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0946-7076
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