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Reduction of metal oxide thin layers by hydrogen plasma

✍ Scribed by F Brecelj; M Mozetic

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 162 KB
Volume: 40
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)90149-s

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