Reduction of dislocation density of MBE-
Reduction of dislocation density of MBE-grown Si1−xGex layers on (100) Si by rapid thermal annealing
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B. Holländer; S. Mantl; W. Jäger; F. Schäffler; E. Kasper
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Article
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1989
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Elsevier Science
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English
⚖ 452 KB