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Reduction of carbon impurity in GaAs by photo-irradiation in atomic layer epitaxy

✍ Scribed by S. Iwai; T. Meguro; H. Isshiki; T. Sugano; Y. Aoyagi


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
313 KB
Volume
79-80
Category
Article
ISSN
0169-4332

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