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Recrystallization of silicon-on-insulator layers in pulsed nanosecond heating (model calculations)

✍ Scribed by L.N. Aleksandrov; V.Yu. Balandin; A.V. Dvurechenskii; O.A. Kulyasova

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 442 KB
Volume: 171
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90046-1

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