✦ LIBER ✦
Scanning electron microscopy study of seeded recrystallization of silicon-on-insulator layers with either polycrystalline or epitaxially deposited silicon in the seed windows: D A Smith et al, J appl Phys, 63, 1988, 1438–1441
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 149 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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