Recrystallization characteristics of polycrystalline silicon films amorphized by germanium ion implantation : Myeon-Koo Kang et al., Solid-State Electronics, 38, 2, 383 (1995)

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 112 KB
• Volume: 36
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(96)82007-5