Reconstruction of the time-averaged sheath potential profile in an argon radiofrequency plasma using the ion energy distribution

✍ Scribed by Fivaz, M; Brunner, S; Schwarzenbach, W; Howling, A A; Hollenstein, C

• Book ID: 126223391
• Publisher: Institute of Physics
• Year: 1995
• Tongue: English
• Weight: 399 KB
• Volume: 4
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/4/3/007