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End-boundary sheath potential, electron and ion energy distribution in the low-pressure non-ambipolar electron plasma

✍ Scribed by Chen, Lee; Chen, Zhiying; Funk, Merritt


Book ID
121393349
Publisher
Institute of Physics
Year
2013
Tongue
English
Weight
884 KB
Volume
22
Category
Article
ISSN
0963-0252

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## Abstract A study of the synthesis of carbon nanoparticles embedded in carbon thin films deposited by radiofrequency (RF) (13.56 MHz) Ar/H~2~ (4 %)/C~2~H~2~ plasmas is presented. The carbon nanospheres exhibit an amorphous structure that is clearly observed at 300 W, under 0.1 Torr, and grows in