Reconstruction of the precision surface shape of substrates for reflective X-ray optical components on the basis of single-axis profilometer measurements

✍ Scribed by I. S. Savel’ev

• Book ID: 110203433
• Publisher: Pleiades Publishing
• Year: 2011
• Tongue: English
• Weight: 642 KB
• Volume: 5
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/s1027451011060188