Recombination mechanism of InGaN multiple quantum wells grown by metalorganic chemical vapor deposition
β Scribed by Z. C. Feng; W. Liu; S. J. Chua; J. H. Chen; C. C. Yang; W. Lu; W. E. Collins
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 122 KB
- Volume
- 2
- Category
- Article
- ISSN
- 1862-6351
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Zn-doped InGaN thin films were deposited on GaN/sapphire by metalorganic chemical vapor deposition, and studied by a combination of high-resolution X-ray diffraction (HR-XRD), micro-photoluminescence (PL) and secondary ion mass spectrometry (SIMS). Indium phase separation is studied comparatively. H
## Abstract InGaN/GaN multiple quantumβwell structures and InβGaN/ GaN multilayers were grown on GaN/sapphire substrates by lowβpressure metalorganic chemical vapor deposition. As the tertiarybutylarsine flow rate increased, we observed various unexpected structural and optical results. These resul