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Rechargeable lithium thin film cells with inorganic electrolytes

โœ Scribed by Jun-ichi Yamaki; Hideaki Ohtsuka; Takahisa Shodai


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
414 KB
Volume
86-88
Category
Article
ISSN
0167-2738

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Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r